Gas injector with baffle

ABSTRACT

Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.16/116,531, filed Aug. 29, 2018, which claims benefit of Indianprovisional Appl. No. 201741035705, filed Oct. 9, 2017, which are hereinincorporated by reference in their entirety.

BACKGROUND Field

Embodiments described herein generally relate to a gas injector insertproviding for uniform flow of fluid.

Description of the Related Art

Semiconductor fabrication processing is generally accomplished byintroducing a precursor gas or gas mixture into a vacuum chamber thatcontains a substrate. The precursor gas or gas mixture in the chamberundergoes a chemical reaction with the addition of heat and deposits onthe substrate. The process gas travels through several components beforereaching the substrate. The gas flow is directed from a gas injector andthrough a tunnel. The tunnel directs gas flow towards the substrate asprocess gases enter the processing chamber. Process gases enter thetunnel at a high velocity through the gas inject of the cartridge. Themomentum of the gas flow carries the process gases to the substratewhere deposition occurs. The gas flows from the gas inject to the tunneland towards the substrate.

However, any variations in process conditions affect the gas flowpathway and thus deposition uniformity. One such process conditionaffecting gas flow path is the variation in gas injector installation orgas injector manufacturing. The changes in the flow as the gas comes incontact with the gas injector cause variations in deposition and thusaffect uniformity.

Therefore, there is a need for an improved gas injector insert capableof providing a uniform gas flow pathway.

SUMMARY

Embodiments described herein generally relate to a gas injectorproviding for uniform flow of fluid. In one or more embodiments, a gasinjector is disclosed. The gas injector includes a plenum body. Theplenum body includes a recess, a protrusion adjacent to the recess andextending laterally away from the plenum body, and a plurality ofnozzles extending laterally from an exterior surface of the plenum body.The plenum body has a plurality of holes in an exterior wall of theplenum body. Each nozzle is in fluid communication with an interiorvolume of the plenum body.

In other embodiments, a gas injector is disclosed. The gas injectorincludes a plenum body. The plenum body includes a recess and aprotrusion adjacent to the recess and extending laterally away from theplenum body. The protrusion has a plurality of holes and a baffleadjacent the plurality of holes. The plurality of holes provides fluidcommunication between an interior volume of the plenum body and thebaffle.

In other embodiments, a gas injector is disclosed. The gas injectorincludes a plenum body. The plenum body includes a recess and aprotrusion adjacent to the recess and extending laterally away from theplenum body. The protrusion includes a divider disposed across aninterior volume of the plenum body separating the interior volume into afirst volume adjacent to the recess and a second volume. The divider hasa plurality of holes that provide fluid communication between the firstvolume and the second volume. The protrusion also includes an opening influid communication with the second volume.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the disclosurecan be understood in detail, a more particular description of thedisclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this disclosure and are therefore not to beconsidered limiting of scope, for the disclosure may admit to otherequally effective embodiments.

FIG. 1 shows a prospective view of a gas injector according to one ormore embodiments described herein.

FIGS. 2A-2B show a sectional view of the gas injector according toembodiments described herein.

FIGS. 3A-3D show a sectional view of a gas injector according toembodiments described herein.

FIGS. 4A-4B show a sectional view of a gas injector according toembodiments described herein.

FIGS. 5A-5B show a sectional view of a gas injector according toembodiments described herein.

FIG. 6A shows a side view of a gas injector according to embodimentsdescribed herein.

FIG. 6B shows a cross sectional view of the plug of FIG. 6A.

FIG. 7 shows a prospective view of a gas injector according to one ormore embodiments described herein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation.

DETAILED DESCRIPTION

Embodiments described herein generally relate to a gas injectorproviding for uniform flow of fluid. In one or more embodiments, the gasinjector includes a plenum body with a recess, a protrusion adjacent tothe recess and extending laterally away from the plenum body, and aplurality of nozzles extending laterally from an exterior surface of theplenum body. The plenum body has a plurality of holes in an exteriorwall of the plenum body. Each nozzle is in fluid communication with aninterior volume of the plenum body. By directing the flow of fluid, thegas injector provides for a more uniform deposition.

FIG. 1 shows a perspective view of a gas injector 100 according to oneor more embodiments described herein. The various gas injectorsdescribed herein may be used in any suitable deposition process, such asa furnace, a temperature-controlled chamber, or a chemical vapordeposition (CVD) process. One suitable chamber that may be used is aVANTAGE® RADOX™ RTP chamber available from Applied Materials, Inc.,Santa Clara, Calif. Another suitable chamber may be a PRODUCER® CVDchamber also available from Applied Materials, Inc., Santa Clara, Calif.Other systems from other manufacturers may also benefit from the gasinjectors described herein. The gas injector 100 is inserted into aprocess chamber with a passage for a fluid formed therein. In one ormore embodiments, the gas injector 100 has a plenum body 105 and aprotrusion 120 attached to the plenum body 105. The various gasinjectors described herein may be machined or 3D printed. The variousgas injectors described herein may be a single piece or may be variouspieces joined together.

The plenum body 105 includes a first surface 125, a second surface 150,a third surface 130, a fourth surface 145, a fifth surface 135, and asixth surface 140. The first surface 125 may be a flange. The firstsurface 125 may be a top surface. The second surface 150 may be a bottomsurface. Each of the third surface 125, the fourth surface 145, thefifth surface 135, and the sixth surface 140 may be side surfaces. Inone or more embodiments, the body 105 is rectangular with rounded edges.The plenum body 105 includes rounded corners and a centrally locatedrecess 115. The first surface 125 is opposite the second surface 150.The third surface 130 is orthogonal to the first surface 125 andopposite the fourth surface. The fifth surface 135 is opposite the sixthsurface 140 and orthogonal to the first surface 125. The third surface130 and the fourth surface 145 may have about equal lengths. The fifthsurface 135 and the sixth surface 140 may have about equal lengths. Thelength of the third surface 130 may be greater than the length of thefifth surface 135. In one or more embodiments, the length of the thirdsurface 130 is in a range from about 12 inches to about 16 inches. Thelength of the fifth surface 135 is in a range from about 1 inch to about3 inches.

A plurality of holes 110 is disposed in the first surface 125 of theplenum body 105. The plurality of holes 110 is disposed towards theouter edges of the first surface 125 and extend into the third surface130 on one side and the fourth surface 145 on the opposite side. Thus,the plurality of holes 110 is formed in an exterior wall of the plenumbody 105 and extends into two surfaces of the plenum body 105. In one ormore embodiments, the plurality of holes is disposed along the length ofthe first surface 125. In one or more embodiments, there are a greaternumber of holes at the intersection of the first surface 125 with thefourth surface 145 than at the intersection of the first surface 125with the third surface 130. The number of holes 110 may vary from about10 to about 15. Each of the holes 110 may be a half circle in shape. Forexample, each of the holes 110 may extend through two surfaces of thebody 105 forming a “D” shape. The gas injector 100 attaches to a processchamber with one or more fasteners through the plurality of holes 110.The fasteners may be screws, bolts, clips, or the like. In one or moreembodiments, the gas injector 100 is attached to a base plate in aprocessing chamber with screws through the plurality of holes 110.

The recess 115 is centrally disposed within the first surface 125 of theplenum body 105. The recess 115 of FIG. 1 is rectangular in shape withrounded corners. In other embodiments, the recess 115 may be ellipticalor oblong. The length of the recess may be in a range from about 11inches to about 13 inches. The width of the recess may be in a rangefrom about 0.15 inches to about 0.25 inches. In operation, process gasesflow through the recess 115 from a gas inject (not shown). The recess115 extends through the interior of the protrusion 120.

The protrusion 120 extends from the second surface 150. FIG. 2A shows asectional view of the gas injector 100 of FIG. 1. A plurality of nozzles210 extend laterally from the exterior surface of the plenum body 105.In one or more embodiments, the plurality of nozzles 210 extendslaterally from the protrusion 120. Although only two nozzles 210 areshown in FIG. 2A, there may be a plurality of nozzles 210 on each side.In one or more embodiments, the number of nozzles 210 may be between 4and 20. In the embodiment of FIG. 2A, the plurality of nozzles 210 aredisposed on both sides of the protrusion 120. In other embodiments, theplurality of nozzles 210 may be disposed on one side alone. Theplurality of nozzles 210 may have a cross-sectional shape that iscircular, square, rectangular, obround, oblong, oval, or any othergeometric shape. The recess 115 is in fluid communication with thenozzles 210. The plurality of nozzles 210 may extend a distance lessthan the width of the body 105. In one or more embodiments, the nozzles210 extend a distance from about 0.3 inches to about 0.5 inches from theprotrusion 120. Each nozzle 210 is in fluid communication with theinterior volume of the plenum body 105. Each nozzle 210 has an opening215. In one or more embodiments, the width of each opening 215 may besubstantially the same. When the gas injector 100 is installed in achamber, the nozzles 210 may be adjacent to a base ring 216 of thechamber such that the opening 215 faces a surface of the base ring 216.The base ring 216 and the gas injector 100 are disposed adjacent to theroof 218 of a gas passage.

In other embodiments, the width of each opening 215, 230 may vary, asseen in FIG. 2B. For example, all the nozzles 210 on a first side 220 ofthe protrusion 120 may have substantially the same size opening 215while the nozzles 210 on a second side 225 may have different sizeopening 230. Each of the nozzles 210 on the second side 225 may have thesame size opening 230 but be different than the nozzles 210 on the firstside 220. For example, the plurality of openings 215 may have adifferent circumference than the plurality of openings 230. In otherembodiments, the openings 215 are all the same size while the openings230 vary in size. In some examples, the nozzles 210 may be disposed onthe protrusion 120 at various distances from the second surface 150. Inother examples, more than one nozzle 210 on a single side may be alignedin a perpendicular direction to the second surface 150. For example, thefirst side 220 may include more than one nozzle 210 disposed one on topof the other or stacked. In operation, fluid flows through the recess115, to the nozzles 210, and exits the gas injector 100 through theopening 215. The fluid continues through a passage formed in between thegas injector 100 and the base ring 216 towards a tunnel, as shown byarrows in FIG. 2A that depict fluid flow paths. The fluid passes throughthe tunnel into a processing volume of a chamber to interact with asubstrate disposed within the processing volume. The nozzles 210 providemore uniform fluid flow for a more uniform deposition process.

FIGS. 3A-3D show a sectional view of a gas injector 300 according toembodiments described herein. The gas injector 300 may be used in anysuitable deposition process, such as a furnace, a temperature-controlledchamber, or a chemical vapor deposition (CVD) process. The gas injector300 may be used in an assembly to provide gases to a passage for flowinto a processing chamber. The gas injector 300 has a recess 315, a body305, and a protrusion 320. The body 305 includes a first surface 325, asecond surface 350, a third surface 330, a fourth surface 345, a fifthsurface, and a sixth surface. The body 305 is substantially the same asthe body 105 of FIG. 1, a plurality of holes (not shown).

The protrusion 320 extends from the second surface 350. The protrusion320 includes a plurality of holes. The cross-sectional view of FIG. 3Ashows one of the holes 310. The protrusion 320 may include a pluralityof holes in the bottom 355 of the protrusion 320. The plurality of holes310 are in fluid communication with the recess 315. The plurality ofholes 310 are formed through the bottom 355 of the protrusion 320. Inone or more embodiments, the bottom 355 of the protrusion 320 is a wallwith a thickness in a range from about 0.05 inches to about 0.07 inches.In one or more embodiments, the plurality of holes 310 is centrallylocated along the length of the bottom 355 of the protrusion 320. Theplurality of holes 310 may be spaced equidistant from each other. Inother embodiments, the plurality of holes 310 may extend through adivider 475 disposed within the protrusion 320, as seen in FIG. 4A anddescribed in more detail below.

The protrusion 320 also includes a baffle 360. The baffle 360 forms apassage 365 with the bottom 355 of the protrusion 320. The baffle 360includes a first extension 362 and a second extension 364. The firstextension 362 extends from the bottom 355 of the protrusion 320 in adirection that is aligned with, or optionally parallel to, the directionin which the hole 310 extends. The first extension 362 may be orthogonalto the second extension 364. The second extension 364 may be spaced fromthe bottom 355 of the protrusion 320 a distance in a range from about0.04 inches to about 0.05 inches. For example, the passage 365 may havea height (between the second extension 364 and the bottom 355) in arange from about 0.04 inches to about 0.05 inches. In the embodiment ofFIG. 3A, the passage 365 has an opening 370 facing towards a planedefined by extending the third surface 330 of the body. In otherembodiments, the opening 370 may be facing towards the fourth surface345. The opening 370 may be continuous or discontinuous along the lengthof the gas injector 300. In some examples, the baffle 360 may be an endwall of the gas injector 300 connected to the protrusion 320 by a solidside wall and a perforated side wall. In such cases, the passage 365 isan exit plenum of the gas injector 300 and the perforated side wallprovides a plurality of openings 370 for flowing gas from the exitplenum to the exterior of the gas injector.

In the embodiment of FIG. 3B, the baffle 360 may include a lip 366disposed on the second extension 364. The lip 366 may be disposedanywhere along the length of the second extension 364. The lip 366 maybe orthogonal to the second extension 364. The lip 366 may have anycross-sectional shape, including rectangular, square, circular,triangular, and trapezoidal. The lip 366 may have rounded edges or havea textured surface. The gas injector 300 may include an overhang 367.The overhang 367 may be substantially the same size as the lip 366. Inone or more embodiments, the overhang 367 is smaller than the lip 366.In other embodiments, the overhand 367 is larger than the lip 366. Theoverhang 367 may be disposed on the bottom 355 of the protrusion 320. Inone or more embodiments, the overhang 367 is directly opposite from thelip 366. The overhang 367 may be disposed anywhere along the bottom 355of the protrusion 320. For example, the overhang 367 may be disposedopposite the second extension 364 of the baffle 360. The overhang 367may be disposed adjacent to a tunnel overhang 380 disposed on the roof318 of the tunnel. The overhang 367 may be integrally formed with theprotrusion 320. Alternately, the overhang 367 may be a separate pieceattached to the protrusion 320. The tunnel overhang 380 may besubstantially the same size and shape as the overhang 367 of theprotrusion 320, or the overhang 380 may be a different size and/or shapefrom the overhang 367. The tunnel overhang 380 may be disposed anywherealong the length of the roof 318 of the tunnel. In one or moreembodiments, the roof 318 may include more than one tunnel overhang 380.

In the embodiment of FIG. 3C, the baffle 360 includes a plurality ofprojections, in this case a lip 366 and a projection 368 adjacent thelip 366. The projection 368 may be a separate piece attached to thesecond extension 364 of the baffle 360. The projection 368 may also beformed integrally with the baffle 360, or formed as a separate piece andattached to the second extension 364. The projection 368 may have anygeometric shape in cross-section, including square, circular,rectangular, triangular, and trapezoidal. The projection 368 may bedisposed anywhere along the length of the second extension 364. In theembodiment of FIG. 3C, the projection 368, the lip 366, the overhang367, and the tunnel overhang 380 form a saw-tooth configuration with theprojection 368 and lip 366 disposed on the second extension 364 of thebaffle 360 and the overhang 367 and the tunnel overhang 380 disposed onroof 318 of the tunnel. For example, the lip 366 is disposed oppositeand in between the overhang 367 and the tunnel overhang 380. Any numberof the projections 368 and tunnel overhangs 380 may be included on theroof 318 of the tunnel and the baffle 360, respectively. For example,the embodiment of FIG. 3D includes the lip 366 and the projection 368.In another example, the baffle 360 may be similar to that of FIG. 3Awith overhang or tunnel overhangs adjacent the baffle 360. Each of thelip 366, the projection 368, and the overhang 367 may be machined or 3Dprinted as one piece of the baffle 360 (e.g., monolithic) or may beattached as one or more separate pieces to the baffle 360.

The baffle 360 may be a separate piece from the protrusion 320. In otherembodiments, the baffle 360 may be machined or 3D printed as part of theprotrusion 320. In operation, a fluid source flows through the recess315, through the plurality of holes 310, through the passage 365 formedby the baffle 360, and continuing to a substrate. In other embodiments,the baffle 360 may include a textured surface or coating. The texturedsurface or coating may be small projections between about 25 microns andabout 100 microns. The small projections may be circular, continuous,discontinuous, square, rectangular, or any other geometric shape. Thetextured surface or coating may be disposed on the second extension 364.By providing a barrier, the baffle 360 slows the velocity of the processgases flowing from the recess 315, provides a smaller area for processgases to mix, redirects the flow of the process gases towards thesubstrate, and provides for a more uniform deposition on the substrate.

In the embodiment of FIG. 4A, a baffle 400 includes a divider 475. Thegas injector 400 is similar to the gas injector 300 shown in FIG. 3A,except for the features described below. The divider 475 is disposedwithin a protrusion 420 forming a plenum 480. The divider 475 isdisposed across an interior of the plenum body 405 separating theinterior volume into a first volume 478 adjacent to the recess 415 and asecond volume within the plenum 480. The divider 475 has a plurality ofholes that provide fluid communication between the first volume 478 andthe plenum 480. The protrusion 420 includes a first side wall 422, asecond side wall 424 opposite the first side wall 422, and a bottom wall426 orthogonal the first side wall 422. The first side wall 422 of theprotrusion 420 is parallel the third surface 430 of the body 405. Theplurality of holes 410 is disposed within the divider 475. The plenum480 is defined, and bounded, by the divider 475, the first side wall422, the second side wall 424, and the bottom wall 426. The protrusion420 has an opening 472 disposed in the first wall 422. The bottom wall426 provides a function similar to the function of the baffle 362 inFIGS. 3A-3D. In one or more embodiments, the opening 472 is disposed inthe second wall 424.

In the embodiment of FIG. 4B, the baffle 400 includes the divider 475and a blocker 485. The gas injector 400 is similar to the gas injector300 shown in FIG. 3A, except for the differences described below. Theblocker 485 has a rectangular body and is disposed within a protrusion420. The blocker 485, together with the first side wall 420, the secondside wall 424, and the divider 475, defines a plenum 482. The blocker485 is disposed across an interior of the plenum body 405 separating theinterior volume of the plenum body 405 into a first volume 478 adjacentto the recess 415 and a second volume within the plenum 482. The blocker485 may rest upon a pair of ledges 490. In the embodiment of FIG. 4B,the pair of ledges 490 is defined by projections, rectangular incross-section, connected to opposite interior walls of the protrusion420. In one or more embodiments, the ledges 490 may have any othergeometric shape in cross-section. In one or more embodiments, the ledge490 is located on the interior wall of the plenum body 405. Thus, theblocker 485 may be disposed in the interior volume of the plenum body405. The blocker 485 has a plurality of holes 412 that provide fluidcommunication between the interior volume of the plenum body 405 and theplenum 482. In the embodiment of FIG. 4B, the plenum 480 defines a thirdinterior volume of the plenum body 405. The divider 475 has a pluralityof holes that provide fluid communication between the plenum 482 and theplenum 480. In the embodiment of FIG. 4B, the plenum 482 is a firstplenum and the plenum 480 is a second plenum. In one or moreembodiments, the holes 410 of the divider 475 have a different size thanthe plurality of holes of the blocker 485. For example, the plurality ofholes of the divider 475 may be smaller than the plurality of holes ofthe blocker 485 or the plurality of holes of the divider 475 may belarger than the plurality of holes of the blocker 485. In one or moreembodiments, the holes of the divider 475 are the same size as theplurality of holes of the blocker 485.

In other embodiments, the bottom wall 426 may include a textured surfaceor coating. The textured surface or coating may be small projectionsextending away from an interior surface of the bottom wall at a distancebetween about 25 microns and about 100 microns. The small projectionsmay be continuous or discontinuous, and may have any geometric shape incross-section, including circular, square, and rectangular. The texturedsurface or coating may be disposed on the interior surface of the bottomwall 426. In operation, the textured surface may increase the dispersionof the gas, and uniformity of gas flow, along the passage 465.

FIGS. 5A-5B show a sectional view of a gas injector assembly 500according to embodiments described herein. The gas injector assembly 500includes the gas injector 300 and a gas inlet 580 coupled to the gasinjector 300. The gas inlet 580 may have a single opening 582, as seenin FIG. 5A. In other embodiments, the gas inlet 580 may have twoopenings 582, 584, as seen in FIG. 5B. The first opening 582 may be onthe opposite side of the gas inlet 580 from the second opening 584. Thetwo openings 582, 584 may be on opposite sides of the gas injectorassembly 500. In other embodiments, the gas inlet 580 may include anadditional optional center opening that may be used in addition to, orinstead of, the opening 582, the opening 584, or both of the openings582 and 584. The gas inlet 580 may be utilized with any of the gasinjectors described herein.

FIG. 6A shows a side view of a gas injection assembly 600 according toembodiments described herein. The gas injection assembly 600 has a body605 with a recess 615 formed in a first surface 625 of the body 605 anda plurality of holes 610 formed through an outlet wall 650 opposite thefirst surface 625. The recess 615 has a first side wall 612 and a secondside wall 614 opposite the first side wall 612. The first side wall 612,the second side wall 614, and an outlet wall 616 define an interiorvolume 618 for gas flow through the body 605. The body 605 has a passage606 formed therein extending from a gas inlet port 620 at the firstsurface 625 to an opening 622 in the first side wall 612. The passage606 is in fluid communication with the interior volume 618 and the holes610. A gas conduit 680 may be coupled to the gas inlet port 620 to flowgas into the passage 606, through the interior volume 618, exiting thegas injection assembly 600 through the holes 610. A cap 690 rests on thefirst surface 625 and engages with the recess 615 to form a plenumdefined by the interior volume 618. The cap 690 has a flange portion 693that allows the cap 690 to rest on the first surface 625 and a plugportion 691 that engages the recess 615. In the embodiment of FIG. 6A,the first and second side walls 612 and 614 are substantiallyperpendicular to the first surface 625 and the outlet wall 616. The plugportion 691 of the cap 690 has a shape that follows the shape of thefirst and second side walls 612 and 614 near the first surface 625 toprovide a press fit.

In other embodiments shown in FIG. 6B, the plug portion has a taperedshape such that a width of the plug portion declines with extent intothe recess 615. The first and second side walls 612 and 614 may have atapered shape near the first surface 625 that matches the tapered shapeof the plug portion 691. The tapered shape of the plug portion 691formed by a first wall 692 and a second wall 694 shown in FIG. 6Benables easy fitting of the cap 690 into the recess 615. The cap 690ensures that gas flowing into the interior volume 618 exits through theholes 610. The gas injection assembly 600 may be used in place of anyother gas injector or gas injection assembly described herein forproviding gas to a gas supply tunnel of a substrate processing chamber.

FIG. 7 shows a perspective view of a gas injector 700 according to oneor more embodiments described herein. The gas injector 700 is similar tothe gas injector 100 of FIG. 1. In the embodiment of FIG. 7, a pluralityof nozzles 710 extend laterally from the exterior surface of the plenumbody 105. In one or more embodiments, the plurality of nozzles 710extends laterally from the exterior surface of the protrusion 120 atvarious angles to direct gas flow through the nozzles 710. For example,each nozzle 710 may extend from the protrusion 120 at a different angle.In other embodiments, each nozzle 710 may form an angle of about 30° toabout 90° with the protrusion 120. In one or more embodiments, theplurality of nozzles 710 extends from the protrusion 120 in a wave orfan pattern such that each nozzle 710 forms an angle of about 10° toabout 20° with each neighboring nozzle 710. The nozzles 710 at eitherend of the protrusion 120 may be laterally perpendicular to theprotrusion 120. The nozzles between the nozzles at either end of theprotrusion 120 may point in different directions such that the tips ofthe nozzles form a wave pattern with a peak, which may be near thecenter of the protrusion 120 along its length. In other embodiments, thenozzles 710 may extend laterally from the protrusion 120 at a variety ofdifferent angels. In one or more embodiments, the nozzles 710 may pointlaterally inward towards the center of the protrusion 120. In otherembodiments, the nozzles 710 may point laterally outward away from thecenter of the protrusion 120. In the embodiment of FIG. 7, the nozzles710 point in a variety of different lateral and elevation directions.For example, the outer most nozzles 710 point laterally inward while theother nozzles 710 point in a variety of elevation directions.

In other embodiments, the plurality of nozzles 710 may be spaced apartvarious distances from one another. The distance between each nozzle 710and its neighbors may be uniform, non-uniform, or have a repeatingpattern across all the nozzles 710. For example, in the embodiment ofFIG. 7 or FIG. 1, nozzles near the center of the protrusion 120 may bespaced wider than nozzles near the ends of the protrusion 120. Inanother example, in the embodiment of FIG. 7 or FIG. 1, nozzles near thecenter of the protrusion 120 may have a smaller diameter than nozzlesnear the ends of the protrusion 120. Although the plurality nozzles 710are shown only on one side in FIG. 7, there may be a plurality ofnozzles 710 on each side. In one or more embodiments, the number ofnozzles 710 may be in a range from about 4 to about 25. The plurality ofnozzles 710 may have a cross-sectional shape that is circular, square,rectangular, obround, oblong, oval, or any other geometric shape. Therecess 115 is in fluid communication with the nozzles 710. The pluralityof nozzles 710 may extend a distance less than the width of the body105. In one or more embodiments, the nozzles 710 extend from theprotrusion 120 to a distance in a range from about 0.3 inches to about0.5 inches, although the nozzles 710 may have any suitable length, andmay have a variety of different lengths, which may be random oraccording to a pattern. Each nozzle 710 is in fluid communication withthe interior volume of the plenum body 105.

While the foregoing is directed to embodiments of the disclosure, otherand further embodiments may be devised without departing from the basicscope thereof, and the scope thereof is determined by the claims thatfollow.

What is claimed is:
 1. A gas injector comprising: a plenum body, whereinthe plenum body comprises: a top surface and a bottom surface oppositethe top surface; a recess formed into the top surface; and a protrusionextending laterally away from the bottom surface of the plenum body,wherein the protrusion comprises: at least one hole formed within adivider; and a baffle adjacent the at least one hole, wherein the atleast one hole provides fluid communication between an interior volumeof the plenum body and the baffle, and wherein the interior volumeextends from the recess, through the plenum body and the lower surface,and into the protrusion; and an opening formed through a side wall ofthe protrusion and in fluid communication with the interior volume. 2.The gas injector of claim 1, wherein the baffle comprises a firstextension and a second extension orthogonal the first extension.
 3. Thegas injector of claim 2, wherein the first extension connects to abottom surface of the protrusion.
 4. The gas injector of claim 3,wherein the second extension is spaced from the protrusion by a distanceof about 0.04 inches to about 0.05 inches.
 5. The gas injector of claim1, wherein the divider has a plurality of holes that provide fluidcommunication between the first volume and the second volume.
 6. The gasinjector of claim 5, wherein the plurality of holes is disposed on abottom surface of the protrusion.
 7. The gas injector of claim 6,wherein the plurality of holes is centrally located within the bottomsurface of the protrusion.
 8. The gas injector of claim 5, wherein theplenum body further comprises another plurality of holes which disposedin a top surface of the plenum body.
 9. The gas injector of claim 1,further comprising a textured surface or coating on an interior surfaceof the protrusion, the interior surface surrounding the interior volume,wherein the textured surface or coating has projections extending awayfrom the interior surface.
 10. The gas injector of claim 9, wherein theprojections extend from the interior surface a distance of about 25microns and about 100 microns.
 11. A gas injector comprising: a plenumbody, wherein the plenum body comprises: a recess; a protrusionextending laterally away from the plenum body, wherein the protrusioncomprises: a divider disposed across an interior volume of the plenumbody separating the interior volume into a first volume adjacent to therecess and a second volume extending into the protrusion, wherein thedivider has at least one hole that provides fluid communication betweenthe first volume and the second volume; a side wall and a bottom wallorthogonal to the side wall; and an opening formed through the side walland in fluid communication with the second volume.
 12. The gas injectorof claim 11, wherein the second volume is within the protrusion.
 13. Thegas injector of claim 11, wherein the opening is disposed in a side wallof the protrusion.
 14. The gas injector of claim 11, wherein the divideris spaced from a bottom surface of the protrusion by a distance of about0.04 inches to about 0.60 inches.
 15. The gas injector of claim 11,further comprising a textured surface or coating on an interior surfaceof the protrusion, the interior surface surrounding the second volume,wherein the textured surface or coating has projections extending awayfrom the interior surface.
 16. The gas injector of claim 15, wherein theprojections extend from the interior surface a distance of about 25microns and about 100 microns.
 17. The gas injector of claim 11, whereinthe plenum body further comprises a plurality of holes disposed in a topsurface of the plenum body.
 18. A gas injector comprising: a plenumbody, wherein the body comprises: a top surface and a bottom surfaceopposite the top surface; a recess formed into the top surface; and aprotrusion extending laterally away from the bottom surface of theplenum body, wherein the protrusion comprises: a divider disposed acrossan interior volume of the plenum body separating the interior volumeinto a first volume adjacent to the recess and a second volume extendinginto the protrusion, wherein the divider has at least one hole thatprovide fluid communication between the first volume and the secondvolume; a side wall; and an opening formed through the side wall and influid communication with the second volume. wherein the divider has aplurality of holes that provide fluid communication between the firstvolume and the second volume.
 19. The gas injector of claim 18, furthercomprising a textured surface or coating on an interior surface of theprotrusion, the interior surface surrounding the second volume, whereinthe textured surface or coating has projections extending away from theinterior surface.
 20. The gas injector of claim 18, wherein the dividerhas a plurality of holes that provide fluid communication between thefirst volume and the second volume.